"NANOPOWER: Nanoscale energy management for powering ICT devices" acknowledges the financial support of the Future and Emerging Technologies (FET) programme within the ICT theme of the Seventh Framework Programme for Research of the European Commission (Grant Agreement n. 256959).

Ultra-thin free-standing single crystalline silicon membranes with strain control

TitleUltra-thin free-standing single crystalline silicon membranes with strain control
Publication TypeJournal Article
Year of Publication2013
AuthorsShchepetov, A., Prunnila M., Alzina F., Schneider L., Cuffe J., Jiang H., Kauppinen E. I., Sotomayor Torres C. M., and Ahopelto J.
JournalApplied Physics Letters
Volume102
Issue19
Pagination192108
Date Published2013
ISSN00036951
DOI10.1063/1.4807130
Short TitleAppl. Phys. Lett.